P.O.U.
Slurry P.O.U.
Slurry P.O.U.
•HCl - Hydrochloric Acid Dispense
•HF and BHF Dispense
•H2SO4 - Sulfuric Acid Dispense
•H3PO4 - Phosphoric Acid Dispense
•H2O2 - Hydrogen Peroxide Dispense
•NH4OH - Ammonium Hydroxide Dispense
•TMAH Precision developer Dispense
•SC1/SC2 Dispense
• Simple
• Inexpensive
• Chemical delivery
• A/B carboy switchover
• PTFE quick connects for fast and safe changeouts
• Semi S2-93 and CE compliant
• Non-intrusive sensor package
• Pulse free flow through high purity pump system
• Splash guard
• Exhaust failure monitoring
• Filter venting
• Full factory management interface.
• Provisions for double containment and leak detection
Slurry P.O.U.
Slurry P.O.U.
Slurry P.O.U.
•Silicon Carbide Slurry Dispense
•Copper Slurry Dispense
•Plating Solution Dispense
• Simple
• Inexpensive
• Slurry delivery
• A/B carboy switchover
• PTFE quick connects for fast and safe changeouts
• Semi S2-93 and CE compliant
• Non-intrusive sensor package
• Pulse free flow through high purity pump system
• Splash guard
• Exhaust failure monitoring
• Filter venting
• Full factory management interface.
• Provisions for double containment and leak detection